3D Patterning of Si by Contact Etching With Nanoporous Metals

MLA

Stéphane Bastide, et al. 3D Patterning of Si by Contact Etching With Nanoporous Metals. Jan. 2019. EBSCOhost, https://doi.org/10.3389/fchem.2019.00256⟩.

APA

Stéphane Bastide, Mathieu Halbwax, Sylvain Le Gall, Dmitri Yarekha, Encarnacion Torralba, Elias Mpogui, Jean-Pierre Vilcot, Christine Cachet-Vivier, Vincent Magnin, & Joseph Harari. (2019). 3D Patterning of Si by Contact Etching With Nanoporous Metals. https://doi.org/10.3389/fchem.2019.00256⟩

Chicago

Stéphane Bastide, Mathieu Halbwax, Sylvain Le Gall, Dmitri Yarekha, Encarnacion Torralba, Elias Mpogui, Jean-Pierre Vilcot, Christine Cachet-Vivier, Vincent Magnin, and Joseph Harari. 2019. “3D Patterning of Si by Contact Etching With Nanoporous Metals,” January. doi:10.3389/fchem.2019.00256⟩.