Temperature-dependent oxygen annealing effect on the properties of Ga2O3 thin film deposited by atomic layer deposition

Subjects

Subjects :

History
Polymers and Plastics
Mechanics of Materials
Mechanical Engineering
Materials Chemistry
Metals and Alloys
Business and International Management
Industrial and Manufacturing Engineering

Details

ISSN :

09258388

Volume :

925

Database :

OpenAIRE

Journal :

Journal of Alloys and Compounds

Accession number :

edsair.doi.dedup.....3ddd328a384b3248fb1fec602cc96268

Full Text :

https://doi.org/10.1016/j.jallcom.2022.166727