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Characterization of nanoporous Al 2 O 3 films at terahertz frequencies

Authors :: Min Zhai
David S. Citrin
Deok Ha Woo
Alexandre Locquet
Mi Jung
Georgia Tech Lorraine [Metz]
Université de Franche-Comté (UFC)
Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Georgia Institute of Technology [Atlanta]-CentraleSupélec-Ecole Nationale Supérieure des Arts et Metiers Metz-Centre National de la Recherche Scientifique (CNRS)
Konkuk University [Seoul]
Ecole Nationale Supérieure des Arts et Metiers Metz-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS)-Université de Franche-Comté (UFC)
Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)
Source :: Optics Letters, Optics Letters, Optical Society of America-OSA Publishing, 2020, 45, pp.4092. ⟨10.1364/OL.390129⟩, Optics Letters, Optical Society of America-OSA Publishing, 2020, 45 (14), pp.4092. ⟨10.1364/OL.390129⟩
Publication Year :: 2020
Publisher :: HAL CCSD, 2020.
Abstract: Terahertz birefringence in nanoporous A l 2 O 3 films grown on Al substrates is characterized nondestructively by polarization-resolved terahertz spectroscopy. Sparse deconvolution is used to find the film thicknesses from the data, showing good agreement with the values measured directly by destructive cross-sectional field-emission scanning electron microscopy.

Details

Language :: English
ISSN :: 01469592 and 15394794
Database :: OpenAIRE
Journal :: Optics Letters, Optics Letters, Optical Society of America-OSA Publishing, 2020, 45, pp.4092. ⟨10.1364/OL.390129⟩, Optics Letters, Optical Society of America-OSA Publishing, 2020, 45 (14), pp.4092. ⟨10.1364/OL.390129⟩
Accession number :: edsair.doi.dedup.....40831b5280d08226325e067613697834
Full Text :: https://doi.org/10.1364/OL.390129⟩