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Releasable micro-waveplates
- Publication Year :
- 2019
-
Abstract
- A simple procedure is demonstrated for fabrication of waveplates which can be released from substrate by laser cutting. Oblique angle deposition, chemical etching and laser inscription steps were used for the final lift-off and release of micro-waveplates in HCl solution.<br />3 pages
- Subjects :
- Fabrication
Materials science
Chemical substance
business.industry
Laser cutting
FOS: Physical sciences
Substrate (printing)
Applied Physics (physics.app-ph)
Physics - Applied Physics
Laser
Oblique angle
Isotropic etching
law.invention
law
Optoelectronics
Deposition (phase transition)
business
Optics (physics.optics)
Physics - Optics
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....413ef073e859aef9afd681a33e8639fa