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Non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probe
- Source :
- Journal of Micromechanics and Microengineering. 18:107001
- Publication Year :
- 2008
- Publisher :
- IOP Publishing, 2008.
-
Abstract
- This note reports on an experimental demonstration of non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probe. The experimental system consists of a probe, a 30-micrometers-in-diameter particle, and a substrate plate. The particle, initially adhering to the probe tip, is detached and deposited onto the substrate by rapid change of the probe?substrate voltage designed on the basis of calculation by a boundary element method. The feasibility is experimentally shown; furthermore, the method of modifying the voltage sequence to improve the rate of success by considering the finite slew rate of the power source is discussed.A correction was made to this article (in the introduction) on 18 September 2008. The corrected electronic version is identical to the print version.
- Subjects :
- Cantilever
business.industry
Chemistry
Mechanical Engineering
Analytical chemistry
Slew rate
Substrate (electronics)
Electronic, Optical and Magnetic Materials
Experimental system
Mechanics of Materials
Particle
Optoelectronics
Deposition (phase transition)
Electrical and Electronic Engineering
business
Electrical conductor
Voltage
Subjects
Details
- ISSN :
- 13616439 and 09601317
- Volume :
- 18
- Database :
- OpenAIRE
- Journal :
- Journal of Micromechanics and Microengineering
- Accession number :
- edsair.doi.dedup.....450f4e57b158e4597593983f2673a29c