Fast piezoelectric scanning MEMS mirror for 1D ion addressing

Authors :: Paul Janin
Ralf Bauer
Erling Riis
Paul F. Griffin
Deepak Uttamchandani
Source :: IEEE International Conference on Optical MEMS and Nanophotonics (OMN2019)
Publication Year :: 2019
Publisher :: IEEE, 2019.
Abstract: We present a small-scale piezoelectric MEMS micromirror, with resonant frequencies above 300 kHz for 1D scanning. The device is intended for higher frequency operation by reducing the scale of existing designs, and was fabricated using a multi-user silicon-on-insulator process. The performance of the mirror for addressing points along one axis was demonstrated using a free-space optics experimental setup.

Subjects :: Microelectromechanical systems
Materials science
Hardware_GENERAL
business.industry
TK
Piezoelectric mems
Process (computing)
Ultrafast optics
Scanning mirror
Optoelectronics
business
Piezoelectricity
Ion

Database :: OpenAIRE
Journal :: 2019 International Conference on Optical MEMS and Nanophotonics (OMN)
Accession number :: edsair.doi.dedup.....45cc1e23380cb136521ccd822106dfa3
Full Text :: https://doi.org/10.1109/omn.2019.8925168