Low‐Thermal‐Budget Fluorite‐Structure Ferroelectrics for Future Electronic Device Applications

Subjects

Subjects :

Atomic layer deposition
Materials science
Condensed matter physics
Thermal
General Materials Science
Condensed Matter Physics
Ferroelectricity
Fluorite

Details

ISSN :

18626270 and 18626254

Volume :

15

Database :

OpenAIRE

Journal :

physica status solidi (RRL) – Rapid Research Letters

Accession number :

edsair.doi.dedup.....4667ee5c8c093b73133711e2825729a0

Full Text :

https://doi.org/10.1002/pssr.202170020