Online Test Microstructures of the Thermophysical Properties of MEMS Conducting Films

MLA

Zai-Fa Zhou, et al. Online Test Microstructures of the Thermophysical Properties of MEMS Conducting Films. Jan. 2017. EBSCOhost, https://doi.org/10.1007/978-981-10-2798-7_6-1.

APA

Zai-Fa Zhou, Qing-An Huang, & Hai-Yun Liu. (2017). Online Test Microstructures of the Thermophysical Properties of MEMS Conducting Films. https://doi.org/10.1007/978-981-10-2798-7_6-1

Chicago

Zai-Fa Zhou, Qing-An Huang, and Hai-Yun Liu. 2017. “Online Test Microstructures of the Thermophysical Properties of MEMS Conducting Films,” January. doi:10.1007/978-981-10-2798-7_6-1.