PN Junctions Interface Passivation in 22 nm FDSOI for Low-Loss Passives

Authors :: L. Nyssens
M. Rack
M. Nabet
C. Schwan
Z. Zhao
S. Lehmann
T. Herrmann
D. Henke
A. Kondrat
C. Soonekindt
F. Koch
T. Kache
D. P. Kini
O. Zimmerhackl
F. Allibert
C. Aulnette
D. Lederer
J.-P. Raskin
UCL - SST/ICTM/ELEN - Pôle en ingénierie électrique
Source :: 2022 24th International Microwave and Radar Conference (MIKON).
Publication Year :: 2022
Publisher :: IEEE, 2022.

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