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Microfabrication of hybrid structure composed of rigid silicon and flexible PI membranes
- Source :
- NEMS
- Publication Year :
- 2017
- Publisher :
- IEEE, 2017.
-
Abstract
- We have designed and microfabricated millimeter-scale wing-shaped hybrid microstructures composed of rigid structures of single crystal silicon (SCS) and flexible polyimide (PI) membranes. The wing-shaped microstructures mimicking insect flapping flight have been designed using a fluid-structure interaction analysis, and have been microfabricated using microfabrication technologies with the SCS substrates coated with photosensitive polyimide membranes. The shape of the SCS parts of the hybrid microstructures have been fabricated using deep reactive ion etching (D-RIE) process. The flexible parts of PI membranes have been prepared using photolithography and the subsequent curing process of the micro-patterned photosensitive PI thin film. The wing-shaped hybrid microstructures fabricated have been observed, and the flexibility of the PI membrane part of the hybrid microstructures was also confirmed using the bending test of the PI membrane.<br />12th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), April 9-12, 2017, UCLA Meyer & Renee Luskin Conference Center, Los Angeles, California, USA
- Subjects :
- 030110 physiology
0301 basic medicine
Materials science
Silicon
chemistry.chemical_element
02 engineering and technology
polyimide
law.invention
hydrid structure
03 medical and health sciences
law
Deep reactive-ion etching
Thin film
Composite material
microfabrication
flexible membrane
technology, industry, and agriculture
silicon
021001 nanoscience & nanotechnology
Membrane
Membrane part
chemistry
Photolithography
0210 nano-technology
Polyimide
Microfabrication
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
- Accession number :
- edsair.doi.dedup.....4c48b23c4e837a1944decd9af8ec9d4d