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Modeling and Simulation of SU-8 Thick Photoresist Lithography
Modeling and Simulation of SU-8 Thick Photoresist Lithography
- Source :
- Micro/Nano Technologies ISBN: 9789811059445, Toxinology ISBN: 9789400767256
- Publication Year :
- 2018
- Publisher :
- Springer Singapore, 2018.
- Subjects :
- 0301 basic medicine
Materials science
business.industry
Extreme ultraviolet lithography
02 engineering and technology
021001 nanoscience & nanotechnology
law.invention
Modeling and simulation
03 medical and health sciences
030104 developmental biology
law
Optoelectronics
X-ray lithography
Photolithography
0210 nano-technology
business
Thick photoresist
Lithography
Next-generation lithography
Maskless lithography
Subjects
Details
- ISBN :
- 978-981-10-5944-5
978-94-007-6725-6 - ISBNs :
- 9789811059445 and 9789400767256
- Database :
- OpenAIRE
- Journal :
- Micro/Nano Technologies ISBN: 9789811059445, Toxinology ISBN: 9789400767256
- Accession number :
- edsair.doi.dedup.....525640639de7a5ecbbf5d4424d6fbbd6
- Full Text :
- https://doi.org/10.1007/978-981-10-5945-2_3