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Electrical Characteristics of Nanoelectromechanical Relay with Multi-Domain HfO2-Based Ferroelectric Materials
- Source :
- Electronics, Vol 9, Iss 1208, p 1208 (2020), Electronics, Volume 9, Issue 8
- Publication Year :
- 2020
- Publisher :
- MDPI AG, 2020.
-
Abstract
- Since the discovery of ferroelectricity in HfO2-based materials which are comparable to the complementary metal-oxide&ndash<br />semiconductor (CMOS) fabrication process&mdash<br />a negative capacitance effect in the HfO2-based materials has been actively studied. Owing to nonuniform polarization-switching (which is originated from the polycrystalline structures of HfO2-based ferroelectric materials), the formation of multi-domains in the HfO2-based materials is inevitable. In previous studies, perovskite-based ferroelectric materials (which is not compatible to CMOS fabrication process) were utilized to improve the electrical properties of a nanoelectromechanical (NEM) relay. In this study, the effects of a multi-domain HfO2-based ferroelectric material on the electrical characteristics of an NEM relay were theoretically examined. Specifically, the number of domains, domain inhomogeneity and ferroelectric thickness of the multi-domain ferroelectric material were modulated and subsequently, its corresponding results were discussed. It was observed that the switching voltage variation was decreased with increasing the number of domains and decreasing domain inhomogeneity. In addition, the switching voltage was decreased with increasing ferroelectric thickness, owing to enhanced voltage amplification.
- Subjects :
- Materials science
Fabrication
Computer Networks and Communications
Nanoelectromechanical relay
lcsh:TK7800-8360
02 engineering and technology
01 natural sciences
Ferroelectric capacitor
0103 physical sciences
Electrical and Electronic Engineering
nanoelectromechanical relay
Perovskite (structure)
010302 applied physics
HfO2-based ferroelectric materials
business.industry
lcsh:Electronics
021001 nanoscience & nanotechnology
Ferroelectricity
CMOS
Hardware and Architecture
Control and Systems Engineering
Signal Processing
Optoelectronics
0210 nano-technology
business
ferroelectric capacitor
Negative impedance converter
Voltage
negative capacitance
Subjects
Details
- Language :
- English
- ISSN :
- 20799292
- Volume :
- 9
- Issue :
- 1208
- Database :
- OpenAIRE
- Journal :
- Electronics
- Accession number :
- edsair.doi.dedup.....53f90be2378c4970e000a2c5ab50acab