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A Suspended Silicon Terahertz platform with low loss waveguide and high Q Photonic Crystal cavities
- Source :
- 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Sep 2019, Paris, France. pp.1-2, ⟨10.1109/IRMMW-THz.2019.8873957⟩
- Publication Year :
- 2019
- Publisher :
- HAL CCSD, 2019.
-
Abstract
- International audience; A high Q optical resonator and ultra-low losses of a silicon suspended waveguide, are experimentally measured and presented, in order to demonstrate the working of a designed photoacoustic terahertz gas sensor presented in our previous work.
- Subjects :
- Silicon
Materials science
Loss measurement
Optical resonators
Terahertz radiation
Physics::Medical Physics
Physics::Optics
chemistry.chemical_element
Photoacoustic imaging in biomedicine
02 engineering and technology
01 natural sciences
7. Clean energy
Waveguide (optics)
law.invention
[SPI]Engineering Sciences [physics]
020210 optoelectronics & photonics
Etching (microfabrication)
law
0202 electrical engineering, electronic engineering, information engineering
Cavity resonators
ComputingMilieux_MISCELLANEOUS
Photonic crystal
business.industry
010401 analytical chemistry
0104 chemical sciences
Optical waveguides
Etching
chemistry
Optical cavity
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
Optoelectronics
Optical losses
business
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), Sep 2019, Paris, France. pp.1-2, ⟨10.1109/IRMMW-THz.2019.8873957⟩
- Accession number :
- edsair.doi.dedup.....5914655ca3fee775e545f9a137b66aaa