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Scanning probe assisted local oxidation nanolithography of CVD grown graphene on Ge(l00)
- Source :
- 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO).
- Publication Year :
- 2018
- Publisher :
- IEEE, 2018.
-
Abstract
- We report on the morphological investigation of nanoscale thick patterns obtained by the scanning probe assisted local oxidation technique on graphene layers grown directly on Ge (100) substrates using CVD technique. Protruding mounds and lines are produced by applying a negative voltage to the atomic force microscope probe while translating the probe tip across the sample surface. The main features of the local oxide produced and the differences with respect to similar experiments conducted on Ge or Si samples are presented.
- Subjects :
- Materials Chemistry2506 Metals and Alloy
Negative voltage
Materials science
Morphology (linguistics)
Graphene
business.industry
Atomic force microscopy
Oxide
Bioengineering
02 engineering and technology
Local oxidation nanolithography
Condensed Matter Physics
010402 general chemistry
021001 nanoscience & nanotechnology
01 natural sciences
0104 chemical sciences
law.invention
chemistry.chemical_compound
chemistry
law
Optoelectronics
Electrical and Electronic Engineering
0210 nano-technology
business
Nanoscopic scale
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO)
- Accession number :
- edsair.doi.dedup.....5a49b063e036480e94192349affa48bc