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X-ray nanodiffraction analysis of stress oscillations in a W thin film on through-silicon via
X-ray nanodiffraction analysis of stress oscillations in a W thin film on through-silicon via
- Source :
- 'Journal of Applied Crystallography ', vol: 49, pages: 182-187 (2016), Journal of Applied Crystallography, Journal of Applied Crystallography, International Union of Crystallography, 2016, 49, pp.182-187. ⟨10.1107/S1600576715023419⟩
- Publication Year :
- 2016
-
Abstract
- X-ray nanodiffraction is used to evaluate axial and tangential residual stress distributions in a W thin film deposited on the scalloped inner wall of a through-silicon via. The results reveal oscillatory stress distributions which correlate well with the scallop wavelength and morphology.<br />Synchrotron X-ray nanodiffraction is used to analyse residual stress distributions in a 200 nm-thick W film deposited on the scalloped inner wall of a through-silicon via. The diffraction data are evaluated using a novel dedicated methodology which allows the quantification of axial and tangential stress components under the condition that radial stresses are negligible. The results reveal oscillatory axial stresses in the range of ∼445–885 MPa, with a distribution that correlates well with the scallop wavelength and morphology, as well as nearly constant tangential stresses of ∼800 MPa. The discrepancy with larger stress values obtained from a finite-element model, as well as from a blanket W film, is attributed to the morphology and microstructural nature of the W film in the via.
- Subjects :
- Diffraction
animal structures
Morphology (linguistics)
Materials science
residual stress
macromolecular substances
02 engineering and technology
01 natural sciences
General Biochemistry, Genetics and Molecular Biology
law.invention
Stress (mechanics)
Optics
stomatognathic system
law
Residual stress
0103 physical sciences
through-silicon via
[CHIM]Chemical Sciences
Composite material
Thin film
X-ray nanodiffraction
010302 applied physics
business.industry
X-ray
021001 nanoscience & nanotechnology
Research Papers
Synchrotron
Wavelength
FRELON CAMERA
sense organs
0210 nano-technology
business
Subjects
Details
- Language :
- English
- ISSN :
- 00218898 and 16005767
- Volume :
- 49
- Database :
- OpenAIRE
- Journal :
- Journal of Applied Crystallography
- Accession number :
- edsair.doi.dedup.....5c765063ca4b992c9f4f9832db253684
- Full Text :
- https://doi.org/10.1107/S1600576715023419⟩