Investigation of 2 inch SIC layers grown in a resistively-heated LP-CVD reactor with horizontal 'hot-walls'

MLA

Thierry Chassagne, et al. Investigation of 2 Inch SIC Layers Grown in a Resistively-Heated LP-CVD Reactor with Horizontal “Hot-Walls.” EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi.dedup.....5de6164dd890036860d028cab96fa0d7&authtype=sso&custid=ns315887. Accessed 29 Dec. 2024.

APA

Thierry Chassagne, Carole Balloud, Sandrine Juillaguet, André Leycuras, Hervé Peyre, & Philippe Arcade. (n.d.). Investigation of 2 inch SIC layers grown in a resistively-heated LP-CVD reactor with horizontal “hot-walls.”

Chicago

Thierry Chassagne, Carole Balloud, Sandrine Juillaguet, André Leycuras, Hervé Peyre, and Philippe Arcade. 2024. “Investigation of 2 Inch SIC Layers Grown in a Resistively-Heated LP-CVD Reactor with Horizontal ‘Hot-Walls.’” Accessed December 29. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi.dedup.....5de6164dd890036860d028cab96fa0d7&authtype=sso&custid=ns315887.