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Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media
- Source :
- Journal of Micromechanics and Microengineering, Journal of Micromechanics and Microengineering, 2010, 20, pp.075014-1-8. ⟨10.1088/0960-1317/20/7/075014⟩, Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20, pp.075014-1-8. ⟨10.1088/0960-1317/20/7/075014⟩
- Publication Year :
- 2010
- Publisher :
- HAL CCSD, 2010.
-
Abstract
- In this paper, the authors report for the first time the physical cointegration of piezoelectric actuation and piezoresistive detection on resonating micromembranes dedicated to microgravimetric biosensing applications. The micromembranes are oscillated by a reverse piezoelectric phenomenon provided by a PbZrxTi1−xO3 46/54 thin layer. The oscillation amplitudes are read-out by measuring the resistance change of piezoresistors precisely located on the clamped edges of each micromembrane. The detection of the micromembranes' resonant frequencies is reported in air and deionized water. A dedicated electronic set-up operating the micromembranes in a closed-loop configuration is described. The set-up enables multiplexed tracking of four micromembranes' resonant frequencies in liquid media while enhancing the corresponding quality factors' values. Increases up to 11-fold of the micromembranes' quality factors in liquid is reported for the (0,1) vibration mode. A quality factor of up to 417 is reported in fluid.
- Subjects :
- Engineering
business.industry
Oscillation
Mechanical Engineering
010401 analytical chemistry
Thin layer
Electrical engineering
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Piezoelectricity
Piezoresistive effect
0104 chemical sciences
Electronic, Optical and Magnetic Materials
Silicon based
Vibration
Quality (physics)
Mechanics of Materials
Optoelectronics
Electrical and Electronic Engineering
0210 nano-technology
business
Subjects
Details
- Language :
- English
- ISSN :
- 09601317 and 13616439
- Database :
- OpenAIRE
- Journal :
- Journal of Micromechanics and Microengineering, Journal of Micromechanics and Microengineering, 2010, 20, pp.075014-1-8. ⟨10.1088/0960-1317/20/7/075014⟩, Journal of Micromechanics and Microengineering, IOP Publishing, 2010, 20, pp.075014-1-8. ⟨10.1088/0960-1317/20/7/075014⟩
- Accession number :
- edsair.doi.dedup.....65afe7a300a076f01235fdbae14c56e9