Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces

The grazing emission X-ray fluorescence (GEXRF) technique offers a promising approach to determining the spatial distribution of various chemical elements in nanostructures. In this paper, we present a comparison with grazing incidence small-angle X-ray scattering (GISAXS), an established method for dimensional nanometrology, on periodic TiO