The Effect of Si Content on the Performance of Magnetron Sputtering Hf-Si-N Films

MLA

Guo Jin, et al. “The Effect of Si Content on the Performance of Magnetron Sputtering Hf-Si-N Films.” Physics Procedia, pp. 427–32. EBSCOhost, https://doi.org/10.1016/j.phpro.2013.11.066. Accessed 1 Nov. 2024.

APA

Guo Jin, Meiling Dong, Jinlong Hao, Yang Wang, & Xiufang Cui. (n.d.). The Effect of Si Content on the Performance of Magnetron Sputtering Hf-Si-N Films. Physics Procedia, 427–432. https://doi.org/10.1016/j.phpro.2013.11.066

Chicago

Guo Jin, Meiling Dong, Jinlong Hao, Yang Wang, and Xiufang Cui. 2024. “The Effect of Si Content on the Performance of Magnetron Sputtering Hf-Si-N Films.” Physics Procedia, 427–32. Accessed November 1. doi:10.1016/j.phpro.2013.11.066.