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Selective diffusion of gold nanodots on nanopatterned substrates realized by self-assembly of diblock copolymers
- Source :
- Journal of materials research 26 (2011): 240–246. doi:10.1557/jmr.2010.19, info:cnr-pdr/source/autori:Garozzo C; Puglisi RA; Bongiorno C; Scalese S; Rimini E; Lombardo S/titolo:Selective diffusion of gold nanodots on nanopatterned substrates realized by self-assembly of diblock copolymers/doi:10.1557%2Fjmr.2010.19/rivista:Journal of materials research/anno:2011/pagina_da:240/pagina_a:246/intervallo_pagine:240–246/volume:26
- Publication Year :
- 2011
- Publisher :
- Springer Science and Business Media LLC, 2011.
-
Abstract
- We investigated a simple and low-cost route for the formation of metallic nanodots on Si substrates ordered in size and position and laterally isolated by SiO(2). The method was based on a two-step process: (i) the formation of a nanopattern of ordered cylindrical pores on oxidized Si substrates through self-assembly of diblock copolymers, and successive oxide dry etching down to the Si; (ii) the deposition of gold nanodots and thermal diffusion over the nanopatterned oxide substrates. After diffusion, the nanodot density outside the nanopores was found to decrease, and most of the nanodots were found to saturate the nanopores. The process was followed in situ by transmission electron microscopy (TEM) and ex situ by scanning electron microscopy (SEM) analysis for different thermal budgets. This patterned substrate can be used for catalyst mediated growth, for example, through vapor-liquid-solid (VLS), of nanowires for the formation of absorber materials in novel photovoltaic architectures.
- Subjects :
- Materials science
Scanning electron microscope
Mechanical Engineering
fabrication
advanced lithography
photovoltaic
Self-assembling
polymer
nanostructures
Oxide
Nanowire
Nanotechnology
Condensed Matter Physics
chemistry.chemical_compound
Nanopore
chemistry
Mechanics of Materials
Transmission electron microscopy
General Materials Science
Self-assembly
Dry etching
Nanodot
Subjects
Details
- ISSN :
- 20445326 and 08842914
- Volume :
- 26
- Database :
- OpenAIRE
- Journal :
- Journal of Materials Research
- Accession number :
- edsair.doi.dedup.....740dc860cf95f3fe2c5a4086c9fce692