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Nanocrystallite Seeding of Metastable Ferroelectric Phase Formation in Atomic Layer-Deposited Hafnia–Zirconia Alloys
- Source :
- ACS Applied Materials & Interfaces. 14:53057-53064
- Publication Year :
- 2022
- Publisher :
- American Chemical Society (ACS), 2022.
-
Abstract
- Hafnia-based ferroelectric thin films are promising for semiconductor memory and neuromorphic computing applications. Amorphous, as-deposited, thin-film binary alloys of HfO
- Subjects :
- General Materials Science
Subjects
Details
- ISSN :
- 19448252 and 19448244
- Volume :
- 14
- Database :
- OpenAIRE
- Journal :
- ACS Applied Materials & Interfaces
- Accession number :
- edsair.doi.dedup.....78ba424847941dda9f531fbedc93176c
- Full Text :
- https://doi.org/10.1021/acsami.2c15047