Development of a Cobalt Atomic Layer Deposition Process using Co2(CO)6HC≡CC5H11 as Precursor

Authors :: Franz, Mathias
Daniel, Marcus
Hu, Xiao
Schulz, Stefan E.
Publication Year :: 2023
Publisher :: Zenodo, 2023.
Abstract: Poster presented at the EUROCVD / Baltic ALD conference 2023 in Leuven Belgium.<br />This work was funded by the EFRE fund of the European Commission and by funding of the Free State of Saxony of the Federal Republic of Germany (project ALMET, grant number 100302427).

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