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Fabrication of multiple nanopores in a SiNx membrane via controlled breakdown

Authors :
Wen-Yuan Zhou
Lennart J. de Vreede
Yunlong Wang
Zhi-Bo Liu
Cuifeng Ying
Jianguo Tian
Source :
Scientific Reports, Vol 8, Iss 1, Pp 1-9 (2018)
Publication Year :
2018
Publisher :
Springer Science and Business Media LLC, 2018.

Abstract

This paper reports a controlled breakdown (CBD) method to fabricate multiple nanopores in a silicon nitride (SiNx) membrane with control over both nanopore count and nanopore diameter. Despite the stochastic process of the breakdown, we found that the nanopores created via CBD, tend to be of the same diameter. We propose a membrane resistance model to explain and control the multiple nanopores forming in the membrane. We prove that the membrane resistance can reflect the number of nanopores in the membrane and that the diameter of the nanopores is controlled by the exposure time and strength of the electric field. This controllable multiple nanopore formation via CBD avoids the utilization of complicated instruments and time-intensive manufacturing. We anticipate CBD has the potential to become a nanopore fabrication technique which, integrated into an optical setup, could be used as a high-throughput and multichannel characterization technique.

Details

ISSN :
20452322
Volume :
8
Database :
OpenAIRE
Journal :
Scientific Reports
Accession number :
edsair.doi.dedup.....7d8184b65618b401040555a9b237a3c4
Full Text :
https://doi.org/10.1038/s41598-018-19450-7