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Microwave reflectometry : a high-resolution technique for measuring vibration of capacitive microresonators
- Source :
- Proceedings of 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩
- Publication Year :
- 2013
- Publisher :
- HAL CCSD, 2013.
-
Abstract
- The paper proposes a novel technique for measuring the vibration of capacitive microelectromechanical resonators. Based on microwave reflectometry in the gigahertz range, the technique offers signal-to-noise ratio greater than 100 dB for the studied device and it rejects any parasitic crosstalk due to stray capacitances. Experiments demonstrate that amplitude resolution better than 10 fm/√Hz is achieved, which competes with standard optical interferometry. The technique is particularly appropriate for electrical characterization of MEMS devices but also for signal processing of resonant sensors when large-bandwidth, high signal-to-noise ratio and fully electrical detection is required.
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Proceedings of 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, 2013, Barcelona, Spain. paper M3P.140, 566-569, Outstanding poster presentation award nomination, ⟨10.1109/Transducers.2013.6626829⟩
- Accession number :
- edsair.doi.dedup.....83f2d12bd65585268c68ea50e0697e6c