Novel fabrication process using nanoporous anodic aluminum oxidation and MEMS technologies for gas detection

MLA

Yon-Sheng Huang, et al. “Novel Fabrication Process Using Nanoporous Anodic Aluminum Oxidation and MEMS Technologies for Gas Detection.” Procedia Chemistry, vol. 1, no. 1, Sept. 2009, pp. 56–59. EBSCOhost, https://doi.org/10.1016/j.proche.2009.07.014.

APA

Yon-Sheng Huang, Jun-Wei Huang, Kevin Chih-Cheng Lu, & Sen-Po Wu. (2009). Novel fabrication process using nanoporous anodic aluminum oxidation and MEMS technologies for gas detection. Procedia Chemistry, 1(1), 56–59. https://doi.org/10.1016/j.proche.2009.07.014

Chicago

Yon-Sheng Huang, Jun-Wei Huang, Kevin Chih-Cheng Lu, and Sen-Po Wu. 2009. “Novel Fabrication Process Using Nanoporous Anodic Aluminum Oxidation and MEMS Technologies for Gas Detection.” Procedia Chemistry 1 (1): 56–59. doi:10.1016/j.proche.2009.07.014.