Effect of oxygen plasma on nanomechanical silicon nitride resonators

MLA

Niklas Luhmann, et al. Effect of Oxygen Plasma on Nanomechanical Silicon Nitride Resonators. Jan. 2017. EBSCOhost, https://doi.org/10.48550/arxiv.1706.02957.

APA

Niklas Luhmann, Silvan Schmid, Pedram Sadeghi, Markus Sauer, Annette Foelske-Schmitz, Johannes Schalko, & Artur Jachimowicz. (2017). Effect of oxygen plasma on nanomechanical silicon nitride resonators. https://doi.org/10.48550/arxiv.1706.02957

Chicago

Niklas Luhmann, Silvan Schmid, Pedram Sadeghi, Markus Sauer, Annette Foelske-Schmitz, Johannes Schalko, and Artur Jachimowicz. 2017. “Effect of Oxygen Plasma on Nanomechanical Silicon Nitride Resonators,” January. doi:10.48550/arxiv.1706.02957.