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A Tabletop X-Ray Tomography Instrument for Nanometer-Scale Imaging: Integration of a Scanning Electron Microscope with a Transition-Edge Sensor Spectrometer
- Publication Year :
- 2022
- Publisher :
- arXiv, 2022.
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Abstract
- X-ray nanotomography has proven to be a powerful tool for the characterization of nanoscale materials and structures, such as energy storage devices and next-generation integrated circuits (ICs). In a nanotomography measurement the X-ray spot size must be kept at the nanoscale, which significantly limits the total amount of X-ray flux achievable. Due to this photon limit, nanotomography has been generally restricted to synchrotron facilities, where higher flux can be maintained even at nanoscale spot sizes. Here, we present a laboratory-scale nanotomography instrument, deemed TOMCAT (TOMographic Circuit Analysis Tool). TOMCAT combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) spectrometer. The electron beam generates a highly focused X-ray spot in a metal target, while the TES spectrometer isolates target photons with high signal-to-noise. TOMCAT design is discussed, including target optimization, system geometry, and scan procedures. Features which are 160 nm wide are resolved in three-dimensional images on a Cu-SiO$_2$ IC sample, demonstrating the capabilities of laboratory-scale nanotomography based on a focused electron beam and TES spectrometer.<br />Comment: The following article has been submitted to Review of Scientific Instruments
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....86ab083455659a58c08cc938deb9e6db
- Full Text :
- https://doi.org/10.48550/arxiv.2212.10591