Under-the-cell routing to improve manufacturability

The progressive miniaturization of technology and the unequal scalability of the BEOL and FEOL layers aggravate the routing congestion problem and have a negative impact on manufacturability. Standard cells are designed in a way that they can be treated as black boxes during physical design. However, this abstraction often prevents an efficient use of its internal free resources. This paper proposes an effective approach for using internal routing resources without sacrificing modularity. By using cell generation tools for regular layouts, libraries are enriched with cell instances that have lateral pins and allow under-the-cell connections between adjacent cells, thus reducing pin count, via count and routing congestion. An approach to generate cells with regular layouts and lateral pins is proposed. Additionally, algorithms to maximize the impact of under-the-cell routing are presented. The proposed techniques are integrated in an industrial design flow. Experimental results show a significant reduction of design rule check violations with negligible impact on timing.