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Transfer of Graphene with Protective Oxide Layers
- Source :
- ChemEngineering, Vol 2, Iss 4, p 58 (2018), ChemEngineering, Volume 2, Issue 4
- Publication Year :
- 2018
- Publisher :
- MDPI AG, 2018.
-
Abstract
- Transfer of graphene, grown by Chemical Vapor Deposition (CVD), to a substrate of choice, typically involves deposition of a polymeric layer (typically, poly(methyl methacrylate, PMMA or polydimethylsiloxane, PDMS). These polymers are quite hard to remove without leaving some residues behind. Here we study a transfer of graphene with a protective thin oxide layer. The thin oxide layer is grown by Atomic Deposition Layer (ALD) on the graphene right after the growth stage on Cu foils. One can further aid the oxide-graphene transfer by depositing a very thin polymer layer on top of the composite (much thinner than the usual thickness) following by a more aggressive polymeric removal methods, thus leaving the graphene intact. We report on the nucleation growth process of alumina and hafnia films on the graphene, their resulting strain and on their optical transmission. We suggest that hafnia is a better oxide to coat the graphene than alumina in terms of uniformity and defects.<br />Comment: 13 pgs, 13 figures
- Subjects :
- 0301 basic medicine
Materials science
General Chemical Engineering
Oxide
FOS: Physical sciences
Applied Physics (physics.app-ph)
02 engineering and technology
Chemical vapor deposition
Substrate (electronics)
law.invention
lcsh:Chemistry
03 medical and health sciences
Atomic layer deposition
chemistry.chemical_compound
law
thin oxide films
Mesoscale and Nanoscale Physics (cond-mat.mes-hall)
atomic layer deposition (ALD)
Deposition (phase transition)
transfer of graphene
Condensed Matter - Mesoscale and Nanoscale Physics
Polydimethylsiloxane
Graphene
Raman spectroscopy of graphene
technology, industry, and agriculture
General Engineering
Physics - Applied Physics
021001 nanoscience & nanotechnology
030104 developmental biology
General Energy
oxide layer deposition on graphene
lcsh:QD1-999
Chemical engineering
chemistry
0210 nano-technology
Layer (electronics)
Subjects
Details
- ISSN :
- 23057084
- Volume :
- 2
- Database :
- OpenAIRE
- Journal :
- ChemEngineering
- Accession number :
- edsair.doi.dedup.....89b02bb3ddbcaab0c9d274f2ff97f28c