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Calculation of thermal parameters of SiGe microbolometers
- Source :
- Russian Physics Journal. 50:1218-1225
- Publication Year :
- 2007
- Publisher :
- Springer Science and Business Media LLC, 2007.
-
Abstract
- The thermal parameters of a SiGe microbolometer were calculated using numerical modeling. The calculated thermal conduction and thermal response time are in good agreement with the values found experimentally and range between 2x10$^-7$ and 7x10$^-8$ W/K and 1.5 and 4.5 ms, respectively. High sensitivity of microbolometer is achieved due to optimization of the thermal response time and thermal conduction by fitting the geometry of supporting heat-removing legs or by selection of a suitable material providing boundary thermal resistance higher than 8x10$^-3$ cm$^2$K/W at the SiGe interface.<br />11 pages, 6 figures
- Subjects :
- Condensed Matter - Materials Science
Materials science
business.industry
Thermal resistance
Materials Science (cond-mat.mtrl-sci)
FOS: Physical sciences
General Physics and Astronomy
Numerical modeling
Microbolometer
Thermal conduction
Thermal response time
Thermal
Optoelectronics
Sensitivity (control systems)
business
Optics (physics.optics)
Physics - Optics
Subjects
Details
- ISSN :
- 15739228 and 10648887
- Volume :
- 50
- Database :
- OpenAIRE
- Journal :
- Russian Physics Journal
- Accession number :
- edsair.doi.dedup.....8d3f7125397aa13236ab69976e67a644