Efficiency improvement of GaN-based micro-light-emitting diodes embedded with Ag NPs into a periodic arrangement of nano-hole channel structure by ultra close range localized surface plasmon coupling

NH-μLED, namely a micro light-emitting diode structure with nano-holes dug all the way through the active region, is designed to make silver nanoparticles in extremely close contact with the quantum wells for improving the coupling between the localized surface plasmon and the quantum wells (LSP-QWs coupling) and thus enhancing the optical properties of the μLED. The experimental results show that, thanks to this deep nanohole structure, the LSP-QWs coupling can be realized effectively, which ultimately increases the optical performance of the μLED. The internal quantum efficiency of the NH-μLED filled with silver nanoparticles is increased by 12%, and the final optical output power is also enhanced. We have further carried out a comparison study which measures the transient lifetime of two different types of μLEDs, and the results provide convincing evidence for the existence of the ultra close range LSP-QWs coupling effect.