Study of dynamic response of silicone elastomer microfabricated Hybrid Membranes versus temperatures and aging time

Authors :: Ravinder Chutani
Alpha Dassimou Diallo
François Lanzetta
S. Khadraoui
Sylvie Bégot
M. De Labachelerie
Magali Barthès
Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST)
Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC)
Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
Source :: HAL, Power MEMS, Power MEMS, Nov 2017, Kanazawa, Japan
Publication Year :: 2018
Publisher :: IOP Publishing, 2018.
Abstract: International audience; Study of dynamic response of silicone elastomer microfabricated hybrid membranes versus temperatures and aging time

Subjects :: [SPI.ACOU]Engineering Sciences [physics]/Acoustics [physics.class-ph]
History
Materials science
020209 energy
education
[SPI.NRJ]Engineering Sciences [physics]/Electric power
technology, industry, and agriculture
02 engineering and technology
021001 nanoscience & nanotechnology
Elastomer
[SPI.AUTO]Engineering Sciences [physics]/Automatic
[SPI.MAT]Engineering Sciences [physics]/Materials
Computer Science Applications
Education
chemistry.chemical_compound
Membrane
Silicone
chemistry
[PHYS.MECA.THER]Physics [physics]/Mechanics [physics]/Thermics [physics.class-ph]
0202 electrical engineering, electronic engineering, information engineering
[PHYS.MECA.MEFL]Physics [physics]/Mechanics [physics]/Fluid mechanics [physics.class-ph]
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Composite material
0210 nano-technology
health care economics and organizations

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