Effect of downscaling nano-copper interconnects on the microstructure revealed by high resolution TEM-orientation-mapping

In this work, a recently developed electron diffraction technique called diffraction scanning transmission electron microscopy (D-STEM) is coupled with precession electron microscopy to obtain quantitative local texture information in damascene copper interconnects (1.8µm‐70 nm in width) with a spatial resolution of less than 5 nm. Misorientation and trace analysis is performed to investigate the grain boundary distribution in these lines. The results reveal strong variations in texture and grain boundary distribution of the copper lines upon downscaling. Lines of width 1.8µm exhibit a strong!111"normal texture and comprise large micron-size grains. Upon downscaling to 180 nm, a{111}!110"bi-axial texture has been observed. In contrast, narrower lines of widths 120 and 70 nm reveal sidewall growth of{111} grains and a dominant!110"normal texture. The microstructure in these lines comprises clusters of small grains separated by high angle boundaries in the vicinity of large grains. The fraction of coherent twin boundaries also reduces with decreasing line width. (Some figures may appear in colour only in the online journal)