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Optical properties of highly n-doped germanium obtained by in situ doping and laser annealing
- Source :
- Journal of physics. D, Applied physics, 50 (2017). doi:10.1088/1361-6463/aa8eca, info:cnr-pdr/source/autori:Frigerio, J.; Ballabio, A.; Gallacher, K.; Gilberti, V.; Baldassarre, L.; Millar, R.; Milazzo, R.; Maiolo, L.; Minotti, A.; Bottegoni, F.; Biagioni, P.; Paul, D.; Ortolani, M.; Pecora, A.; Napolitani, E.; Isella, G./titolo:Optical properties of highly n-doped germanium obtained by in situ doping and laser annealing/doi:10.1088%2F1361-6463%2Faa8eca/rivista:Journal of physics. D, Applied physics (Print)/anno:2017/pagina_da:/pagina_a:/intervallo_pagine:/volume:50
- Publication Year :
- 2017
-
Abstract
- High n-type doping in germanium is essential for many electronic and optoelectronic applications especially for high performance Ohmic contacts, lasing and mid-infrared plasmonics. We report on the combination of in situ doping and excimer laser annealing to improve the activation of phosphorous in germanium. An activated n-doping concentration of 8.8 x 10(19) cm(-3) has been achieved starting from an incorporated phosphorous concentration of 1.1 x 10(20) cm(-3). Infrared reflectivity data fitted with a multi-layer Drude model indicate good uniformity over a 350 nm thick layer. Photoluminescence demonstrates clear bandgap narrowing and an increased ratio of direct to indirect bandgap emission confirming the high doping densities achieved.
- Subjects :
- Materials science
Photoluminescence
Acoustics and Ultrasonics
Annealing (metallurgy)
Band gap
chemistry.chemical_element
Germanium
02 engineering and technology
doping
01 natural sciences
plasmonics
Coatings and Films
0103 physical sciences
Electronic
Optical and Magnetic Materials
Ohmic contact
010302 applied physics
business.industry
Doping
germanium
laser annealing
mid infrared
silicon photonic
Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Surfaces, Coatings and Films
021001 nanoscience & nanotechnology
Drude model
Surfaces
chemistry
Optoelectronics
0210 nano-technology
business
Lasing threshold
Subjects
Details
- Language :
- English
- ISSN :
- 00223727
- Database :
- OpenAIRE
- Journal :
- Journal of physics. D, Applied physics, 50 (2017). doi:10.1088/1361-6463/aa8eca, info:cnr-pdr/source/autori:Frigerio, J.; Ballabio, A.; Gallacher, K.; Gilberti, V.; Baldassarre, L.; Millar, R.; Milazzo, R.; Maiolo, L.; Minotti, A.; Bottegoni, F.; Biagioni, P.; Paul, D.; Ortolani, M.; Pecora, A.; Napolitani, E.; Isella, G./titolo:Optical properties of highly n-doped germanium obtained by in situ doping and laser annealing/doi:10.1088%2F1361-6463%2Faa8eca/rivista:Journal of physics. D, Applied physics (Print)/anno:2017/pagina_da:/pagina_a:/intervallo_pagine:/volume:50
- Accession number :
- edsair.doi.dedup.....95c35af4d0bfbe2376844cfdc1094fc7