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Silicon planar technology for single-photon optical detectors

Authors :
Andrea Giudice
Massimo Ghioni
Delfo Sanfilippo
Giorgio Fallica
Giovanni Bonanno
Franco Zappa
Eva Sciacca
Salvatore Lombardo
C. Di Franco
Sergio Cova
Emanuele Rimini
R. Consentino
Source :
IEEE Transactions on Electron Devices. 50:918-925
Publication Year :
2003
Publisher :
Institute of Electrical and Electronics Engineers (IEEE), 2003.

Abstract

Design and fabrication of single photon avalanche detector (SPAD) in planar technology is reported. Device design and critical issues in the technology are discussed. Experimental test procedures are described for dark-counting rate, afterpulsing probability, photon timing resolution, and quantum detection efficiency. Low-noise detectors are obtained, with dark counting rates down to 10 c/s for devices with 10 /spl mu/m diameter, down to 1 kc/s for 50 /spl mu/m diameter. The technology is suitable for monolithic integration of SPAD detectors and associated circuits.

Details

ISSN :
00189383
Volume :
50
Database :
OpenAIRE
Journal :
IEEE Transactions on Electron Devices
Accession number :
edsair.doi.dedup.....9690418b17a7dececd2d0991932f02ad