Back to Search
Start Over
Silicon planar technology for single-photon optical detectors
- Source :
- IEEE Transactions on Electron Devices. 50:918-925
- Publication Year :
- 2003
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2003.
-
Abstract
- Design and fabrication of single photon avalanche detector (SPAD) in planar technology is reported. Device design and critical issues in the technology are discussed. Experimental test procedures are described for dark-counting rate, afterpulsing probability, photon timing resolution, and quantum detection efficiency. Low-noise detectors are obtained, with dark counting rates down to 10 c/s for devices with 10 /spl mu/m diameter, down to 1 kc/s for 50 /spl mu/m diameter. The technology is suitable for monolithic integration of SPAD detectors and associated circuits.
- Subjects :
- Physics
Fabrication
Photon
sezele
Silicon
Physics::Instrumentation and Detectors
business.industry
Detector
chemistry.chemical_element
Avalanche photodiode
Photon counting
Electronic, Optical and Magnetic Materials
Nonlinear Sciences::Adaptation and Self-Organizing Systems
Planar
Optics
chemistry
Optoelectronics
Electrical and Electronic Engineering
business
Electronic circuit
Subjects
Details
- ISSN :
- 00189383
- Volume :
- 50
- Database :
- OpenAIRE
- Journal :
- IEEE Transactions on Electron Devices
- Accession number :
- edsair.doi.dedup.....9690418b17a7dececd2d0991932f02ad