Effect of pulse-modulated microwaves on fullerene ion production with electron cyclotron resonance ion source

Fullerene plasmas generated by pulse-modulated microwaves have been investigated under typical conditions at the Bio-Nano electron cyclotron resonance ion source. The effect of the pulse modulation is distinct from that of simply structured gases, and then the density of the fullerene plasmas increased as decreasing the duty ratio. The density for a pulse width of 10 μs at the period of 100 μs is 1.34 times higher than that for CW mode. We have studied the responses of fullerene and argon plasmas to pulsed microwaves. After the turnoff of microwave power, fullerene plasmas lasted ∼30 times longer than argon plasmas.