Back to Search
Start Over
Fabrication of nanometer size gaps in a metallic wire
- Publication Year :
- 2000
-
Abstract
- We present a simple shadow mask method to fabricate electrodes with nanometer scale separation. Metal wires with gaps are made by incorporating multiwall carbon nanotubes or single-wall carbon nanotube (SWNT) bundles into a trilayer electron beam lithography process. The simple, highly controllable, and scaleable method has been used to make gaps with widths between 20 and 100 nm and may be extended to gap sizes of 1 nm. We report electron transport measurements of individual SWNTs bridging nanogaps with electrode spacings of approximately 20 nm. Metallic SWNTs exhibit quantum dot behavior with an 80 meV charging energy and a 20 meV energy level splitting. We observe a strong field effect behavior in short semiconducting SWNT segments, evidence for diffusive electron transport in these samples.
- Subjects :
- Shadow mask
Materials science
Physics and Astronomy (miscellaneous)
Energy level splitting
Coulomb blockade
Nanotechnology
Carbon nanotube
Condensed Matter::Mesoscopic Systems and Quantum Hall Effect
law.invention
Carbon nanotube quantum dot
Condensed Matter::Materials Science
Quantum dot
law
Electrode
Electron-beam lithography
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Accession number :
- edsair.doi.dedup.....9d76526b0ea418ccea297dec0e41e42e