Study of complex waveguide structure using soft X-ray reflectivity technique

Grazing incidence x-ray reflectivity (GIXRR) technique is commonly used for structural investigation of layered structures. In case of complex x-ray waveguide structure it is difficult to obtain structural parameters using GIXRR technique owing to narrowly spaced Kiessig fringes. We used GIXRR and soft x-ray reflectivity (SXR) technique to study the x-ray waveguide structure composed of 4 layers Al/ZrC/Al/W on a Si substrate. Structural parameters of the stacks, density, thickness and roughness of the layers, are determined through fitting of SXR data. Advantages of SXR over GIXRR for such layered structure are shown.