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Monitoring the Etching Process in LPFGs towards Development of Highly Sensitive Sensors

Authors :
Francisco J. Arregui
Ignacio R. Matias
Silvia Diaz
Jose L. Cruz
Jesus M. Corres
Ignacio Del Villar
Abian B. Socorro
Universidad Pública de Navarra. Departamento de Ingeniería Eléctrica y Electrónica
Universidad Pública de Navarra / Nafarroako Unibertsitate Publikoa. InaMat - Institute for Advanced Materials
Nafarroako Unibertsitate Publikoa. Ingeniaritza Elektriko eta Elektronikoa Saila
Gobierno de Navarra / Nafarroako Gobernua: 2016/PI008
Gobierno de Navarra / Nafarroako Gobernua: 2016/PC025
Gobierno de Navarra / Nafarroako Gobernua: 2016/PC026
Source :
Proceedings, Vol 1, Iss 4, p 331 (2017), Academica-e: Repositorio Institucional de la Universidad Pública de Navarra, Universidad Pública de Navarra, Academica-e. Repositorio Institucional de la Universidad Pública de Navarra, instname
Publication Year :
2017
Publisher :
MDPI AG, 2017.

Abstract

Trabajo presentado en la Eurosensors 2017 Conference. París, 3–6 de septiembre de 2017. In this work, the monitoring of the etching process up to a diameter of 30 µm of two LPFG structures has been compared, one of them had initially 125 µm, whereas the second one had 80 µm. By tracking the wavelength shift of the resonance bands during the etching process it is possible to check the quality of etching process (the 80 µm fibre performs better than de 125 µm fibre), and to stop for a specific cladding mode coupling, which permits to obtain an improved sensitivity compared to the initial structure. This work was supported by the Spanish Agencia Estatal de Investigación (AEI) and Fondo Europeo de Desarrollo Regional (FEDER) TEC2016-78047-R and by the Government of Navarre through its projects with references: 2016/PI008, 2016/PC025 and 2016/PC026.

Details

Language :
English
ISSN :
25043900
Volume :
1
Issue :
4
Database :
OpenAIRE
Journal :
Proceedings
Accession number :
edsair.doi.dedup.....a0df8a373d4517bc2673f98d3cabb6ad