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Micromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale
- Source :
- Sensors and Actuators B: Chemical, Sensors and Actuators B: Chemical, Elsevier, 2007, 123 (2), p.860-868. ⟨10.1016/j.snb.2006.10.048⟩, Sensors and Actuators B: Chemical, 2007, 123 (2), p.860-868. ⟨10.1016/j.snb.2006.10.048⟩
- Publication Year :
- 2007
- Publisher :
- HAL CCSD, 2007.
-
Abstract
- International audience; Although extensively presented as one of the most promising silicon-based micromachined sensor adapted to real-time measurements in liquid media, the cantilevered structure still suffers from its quality factor (Q) dramatic dependence on the liquid viscosity thus lowering the measurement resolution. In this paper, micromachined piezoelectric membranes are introduced as a potential alternative to the cantilevers for biological applications. HighQ-factors (up to 150) of micromachined piezoelectric membranes resonating in various liquid mixtures (water/glycerol and water/ethanol) are thus reported and a theoretical model proposed by Lamb [H. Lamb, On the vibrations of an elastic plate in contact with water, Proc. Roy. Soc. Lond. A 98 (1920) 205–216] is validated for microscale structures proving that the variation of the liquid viscosity (if lower than 10 cP) has no effect on the dynamic behavior of the membranes. To conclude, two types of experiments were performed in water/glycerol mixtures: in-flow (with liquid continuously flowing on the devices) and in-spot (with individual membranes oscillating in a 5 µL volume of liquid). The results interestingly showed that for the in-spot configuration the Q-factor values are more than two-fold the ones corresponding to in-flow measurements thus providing alternative insights into the way to conceive ideal configurations for real-time biological measurements in liquid media.
- Subjects :
- Materials science
Cantilever
Silicon
Analytical chemistry
FOS: Physical sciences
chemistry.chemical_element
02 engineering and technology
Condensed Matter - Soft Condensed Matter
01 natural sciences
0103 physical sciences
Materials Chemistry
Newtonian fluid
Electrical and Electronic Engineering
Composite material
Instrumentation
Microscale chemistry
010302 applied physics
Microelectromechanical systems
[PHYS.MECA.VIBR]Physics [physics]/Mechanics [physics]/Vibrations [physics.class-ph]
Metals and Alloys
[SPI.MECA.VIBR]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Vibrations [physics.class-ph]
021001 nanoscience & nanotechnology
Condensed Matter Physics
Piezoelectricity
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Vibration
Membrane
chemistry
Soft Condensed Matter (cond-mat.soft)
0210 nano-technology
Subjects
Details
- Language :
- English
- ISSN :
- 09254005
- Database :
- OpenAIRE
- Journal :
- Sensors and Actuators B: Chemical, Sensors and Actuators B: Chemical, Elsevier, 2007, 123 (2), p.860-868. ⟨10.1016/j.snb.2006.10.048⟩, Sensors and Actuators B: Chemical, 2007, 123 (2), p.860-868. ⟨10.1016/j.snb.2006.10.048⟩
- Accession number :
- edsair.doi.dedup.....a34fe235e9effdbb4145998ff24eb9a7