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Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation

Authors :
Silvia Adorno
Fabrizio Cerini
Source :
Proceedings, Vol 2, Iss 13, p 862 (2018)
Publication Year :
2018
Publisher :
MDPI, 2018.

Abstract

A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior of the MEMS structure, and an equivalent electro-mechanical-acoustic lumped-element model, which allows studying the microphone system, i.e. the MEMS-package-ASIC interaction. The platform gives precise estimation of sensitivity and SNR, key parameters of a microphone.

Details

Database :
OpenAIRE
Journal :
EUROSENSORS 2018
Accession number :
edsair.doi.dedup.....a5e55668be20aee52648ad4f8856dcfc
Full Text :
https://doi.org/10.3390/proceedings2130862