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Flexible Simulation Platform for Multilayer Piezoelectric MEMS Microphones with Signal-to-Noise Ratio (SNR) Evaluation
- Source :
- Proceedings, Vol 2, Iss 13, p 862 (2018)
- Publication Year :
- 2018
- Publisher :
- MDPI, 2018.
-
Abstract
- A flexible simulation platform to design new piezoelectric MEMS (micro-electro-mechanical systems) microphones with signal-to-noise ratio (SNR) evaluation is presented. The platform is made of two blocks: a multiphysical FEM model, in order to study the acoustic, mechanical and electrical behavior of the MEMS structure, and an equivalent electro-mechanical-acoustic lumped-element model, which allows studying the microphone system, i.e. the MEMS-package-ASIC interaction. The platform gives precise estimation of sensitivity and SNR, key parameters of a microphone.
- Subjects :
- Microelectromechanical systems
Signal-to-noise ratio (imaging)
Hardware_GENERAL
Microphone
Computer science
Acoustics
Piezoelectric mems
lcsh:A
simulation platform, MEMS microphones, piezoelectric microphones, multilayers piezoelectric MEMS
lcsh:General Works
Sensitivity (electronics)
Finite element method
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- EUROSENSORS 2018
- Accession number :
- edsair.doi.dedup.....a5e55668be20aee52648ad4f8856dcfc
- Full Text :
- https://doi.org/10.3390/proceedings2130862