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Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities
- Source :
- 26th IEEE international conference on micro electro mechanical systems (MEMS 2013), 26th IEEE international conference on micro electro mechanical systems (MEMS 2013), Jan 2013, Taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474310⟩
- Publication Year :
- 2013
- Publisher :
- HAL CCSD, 2013.
-
Abstract
- International audience; We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.
- Subjects :
- Microelectromechanical systems
Materials science
Amplifier
[SPI.MECA.VIBR]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Vibrations [physics.class-ph]
02 engineering and technology
[SPI.MECA.MSMECA]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Materials and structures in mechanics [physics.class-ph]
[SPI.MECA]Engineering Sciences [physics]/Mechanics [physics.med-ph]
[SPI.MECA.SOLID]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Solid mechanics [physics.class-ph]
021001 nanoscience & nanotechnology
01 natural sciences
Piezoelectricity
[SPI.TRON]Engineering Sciences [physics]/Electronics
Nonlinear system
Resonator
Quality (physics)
[SPI.MECA.STRU]Engineering Sciences [physics]/Mechanics [physics.med-ph]/Structural mechanics [physics.class-ph]
Q factor
0103 physical sciences
Electronic engineering
Piezoelectric
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
010306 general physics
0210 nano-technology
Parametric statistics
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- 26th IEEE international conference on micro electro mechanical systems (MEMS 2013), 26th IEEE international conference on micro electro mechanical systems (MEMS 2013), Jan 2013, Taipei, Taiwan. ⟨10.1109/MEMSYS.2013.6474310⟩
- Accession number :
- edsair.doi.dedup.....a5eeea064a22fb6a147704ac0ce084b2