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Piezoelectric and Pyroelectric Energy Harvesting from Lithium Niobate Films

Authors :: Ausrine Bartasyte
Bernard Dulmet
Samuel Margueron
Thomas Baron
Giacomo Clementi
Miguel Angel Suarez
Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174) (FEMTO-ST)
Université de Technologie de Belfort-Montbeliard (UTBM)-Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM)-Université de Franche-Comté (UFC)
Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Centre National de la Recherche Scientifique (CNRS)
Source :: Journal of Physics: Conference Series, Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Dec 2018, Daytona, United States
Abstract: Single-crystalline LiNbO3 films were studied as a pyro- and piezo-electric transducer for energy harvesting applications. Two types of devices: piezoelectric cantilever (PiEH) and pyroelectric chip (ThEH) were microfabricated. Different types of characterization were done, starting from a comparison of finite element method (FEM) simulated eigen-frequencies of cantilever beam and optical vibrometer measurements. According to electrical characterization, resonance frequencies of two cantilevers with different thickness were 1.26 kHz and 485 Hz with generated spontaneous power of 14 μW and 4 μW at 275-300 kΩ, respectively. Finally thermal characterization of pyroelectric samples showed voltage amplitudes ranging from 1 to 2.5mV in the temperature range of 50-200 °C.