Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

Authors :: Xiaoguang Tu
Jussi Hiltunen
Antti Säynätjoki
Tsung-Yang Liow
Marianne Hiltunen
Guo-Qiang Lo
Seppo Honkanen
Ari Tervonen
Lasse Karvonen
Laurent, Vivien
Source :: Karvonen, L, Säynätjoki, A, Tu, X, Liow, T Y, Hiltunen, M, Hiltunen, J, Tervonen, A, Lo, G Q & Honkanen, S 2012, Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films . in V Laurent (ed.), Proceedings of SPIE 8431 : Silicon Photonics and Photonic Integrated Circuits III ., 84311M, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8431, Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, 16/04/12 . https://doi.org/10.1117/12.921805
Publication Year :: 2012
Publisher :: International Society for Optics and Photonics SPIE, 2012.
Abstract: We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2 O 3 ) and double (Al 2 O 3 -TiO 2 ) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides.

Language :: English
Database :: OpenAIRE
Journal :: Karvonen, L, Säynätjoki, A, Tu, X, Liow, T Y, Hiltunen, M, Hiltunen, J, Tervonen, A, Lo, G Q & Honkanen, S 2012, Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films . in V Laurent (ed.), Proceedings of SPIE 8431 : Silicon Photonics and Photonic Integrated Circuits III ., 84311M, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8431, Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, 16/04/12 . https://doi.org/10.1117/12.921805
Accession number :: edsair.doi.dedup.....b5bfbb3874305688a5d1687f378879b8
Full Text :: https://doi.org/10.1117/12.921805