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Polymeric rolled-up microtubes by using strained semiconductor templates
- Source :
- Microelectronic engineering 88 (2011): 2211–2213. doi:10.1016/j.mee.2011.01.061, info:cnr-pdr/source/autori:Laura Blasi; Maria Teresa Todaro; Roberto Cingolani; Adriana Passaseo; Massimo De Vittorio; Giuseppe Gigli/titolo:Polymeric rolled-up microtubes by using strained semiconductor templates/doi:10.1016%2Fj.mee.2011.01.061/rivista:Microelectronic engineering/anno:2011/pagina_da:2211/pagina_a:2213/intervallo_pagine:2211–2213/volume:88
- Publication Year :
- 2011
- Publisher :
- Elsevier BV, 2011.
-
Abstract
- In this paper it is reported a novel approach for the fabrication of polymeric microtubes based on the combination of semiconductor strain released thin films and Layer-by-Layer (LbL) deposition technique. The structure consisting of a LbL self-assembled polylectrolytes (PEs) film deposited onto a strained GaAs/InGaAs bilayer, was properly patterned and structured to enable the self rolling of an array of channels of different lengths. Then, the semiconductor film, acting as a sacrificial template, was selectively etched to obtain polymer microtubes. The so-realized polymeric channels were characterized in detail using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). Additionally, such microtubes were analyzed by confocal microscopy to prove the successful incorporation of a dye molecule within the polymeric nanowalls.
- Subjects :
- chemistry.chemical_classification
Materials science
Fabrication
Scanning electron microscope
business.industry
Bilayer
Layer by layer
technology, industry, and agriculture
Layer-by-Layer
Nanotechnology
Polymer
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Template
Semiconductor
chemistry
Strained semiconductor layer
Electrical and Electronic Engineering
Thin film
business
Polymeric tubular structure
Subjects
Details
- ISSN :
- 01679317
- Volume :
- 88
- Database :
- OpenAIRE
- Journal :
- Microelectronic Engineering
- Accession number :
- edsair.doi.dedup.....b74565a162911958753932ace2fd71ad
- Full Text :
- https://doi.org/10.1016/j.mee.2011.01.061