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Polymeric rolled-up microtubes by using strained semiconductor templates

Authors :
M. De Vittorio
Giuseppe Gigli
Laura Blasi
R. Cingolani
Adriana Passaseo
Maria Teresa Todaro
L., Blasi
M. T., Todaro
Cingolani, Roberto
A., Passaseo
DE VITTORIO, Massimo
Gigli, Giuseppe
Source :
Microelectronic engineering 88 (2011): 2211–2213. doi:10.1016/j.mee.2011.01.061, info:cnr-pdr/source/autori:Laura Blasi; Maria Teresa Todaro; Roberto Cingolani; Adriana Passaseo; Massimo De Vittorio; Giuseppe Gigli/titolo:Polymeric rolled-up microtubes by using strained semiconductor templates/doi:10.1016%2Fj.mee.2011.01.061/rivista:Microelectronic engineering/anno:2011/pagina_da:2211/pagina_a:2213/intervallo_pagine:2211–2213/volume:88
Publication Year :
2011
Publisher :
Elsevier BV, 2011.

Abstract

In this paper it is reported a novel approach for the fabrication of polymeric microtubes based on the combination of semiconductor strain released thin films and Layer-by-Layer (LbL) deposition technique. The structure consisting of a LbL self-assembled polylectrolytes (PEs) film deposited onto a strained GaAs/InGaAs bilayer, was properly patterned and structured to enable the self rolling of an array of channels of different lengths. Then, the semiconductor film, acting as a sacrificial template, was selectively etched to obtain polymer microtubes. The so-realized polymeric channels were characterized in detail using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). Additionally, such microtubes were analyzed by confocal microscopy to prove the successful incorporation of a dye molecule within the polymeric nanowalls.

Details

ISSN :
01679317
Volume :
88
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi.dedup.....b74565a162911958753932ace2fd71ad
Full Text :
https://doi.org/10.1016/j.mee.2011.01.061