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Precise Layer Control of MoTe2 by Ozone Treatment
- Source :
- Nanomaterials, Vol 9, Iss 5, p 756 (2019), Nanomaterials, Volume 9, Issue 5
- Publication Year :
- 2019
- Publisher :
- MDPI AG, 2019.
-
Abstract
- Transition metal dichalcogenides (TMDCs) demonstrate great potential in numerous applications. However, these applications require a precise control of layer thickness at the atomic scale. In this work, we present an in-situ study of the self-limiting oxidation process in MoTe2 by ozone (O3) treatment. A precise layer-by-layer control of MoTe2 flakes can be achieved via multiple cycles of oxidation and wet etching. The thinned MoTe2 flakes exhibit comparable optical properties and film quality to the pristine exfoliated ones. Besides, an additional p-type doping is observed after O3 oxidation. Such a p-doping effect converts the device properties of MoTe2 from electron-dominated to hole-dominated ambipolar characteristics.
- Subjects :
- Ozone
Materials science
General Chemical Engineering
Device Properties
02 engineering and technology
010402 general chemistry
01 natural sciences
Atomic units
lcsh:Chemistry
chemistry.chemical_compound
Transition metal
General Materials Science
self-limiting
business.industry
Ambipolar diffusion
Doping
MoTe2
021001 nanoscience & nanotechnology
Layer thickness
0104 chemical sciences
ozone
chemistry
lcsh:QD1-999
Optoelectronics
0210 nano-technology
business
Layer (electronics)
layer thinning
Subjects
Details
- Language :
- English
- ISSN :
- 20794991
- Volume :
- 9
- Issue :
- 5
- Database :
- OpenAIRE
- Journal :
- Nanomaterials
- Accession number :
- edsair.doi.dedup.....b7fdb0ccc865ed8ca2590218d675df0d