Cite
ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the 'Atomic Layer Deposition Window'
MLA
Julian Pilz, et al. “ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the ‘Atomic Layer Deposition Window.’” Physica Status Solidi (A), vol. 217, no. 8, p. 1900256. EBSCOhost, https://doi.org/10.1002/pssa.201900256. Accessed 10 Mar. 2025.
APA
Julian Pilz, Anna Maria Coclite, Alberto Perrotta, & Günther Leising. (n.d.). ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the “Atomic Layer Deposition Window.” Physica Status Solidi (A), 217(8), 1900256. https://doi.org/10.1002/pssa.201900256
Chicago
Julian Pilz, Anna Maria Coclite, Alberto Perrotta, and Günther Leising. 2025. “ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the ‘Atomic Layer Deposition Window.’” Physica Status Solidi (A) 217 (8): 1900256. Accessed March 10. doi:10.1002/pssa.201900256.