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Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids

Authors :
Pierre Temple-Boyer
Jérôme Launay
B. Torbiero
Jean-Baptiste Doucet
Laurent Mazenq
Véronique Conédéra
Équipe MICrosystèmes d'Analyse (LAAS-MICA)
Laboratoire d'analyse et d'architecture des systèmes (LAAS)
Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1)
Université Fédérale Toulouse Midi-Pyrénées-Université Fédérale Toulouse Midi-Pyrénées-Centre National de la Recherche Scientifique (CNRS)-Université Toulouse III - Paul Sabatier (UT3)
Université Fédérale Toulouse Midi-Pyrénées-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse)
Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Institut National Polytechnique (Toulouse) (Toulouse INP)
Université Fédérale Toulouse Midi-Pyrénées-Université Toulouse - Jean Jaurès (UT2J)-Université Toulouse 1 Capitole (UT1)
Université Fédérale Toulouse Midi-Pyrénées
Service Techniques et Équipements Appliqués à la Microélectronique (LAAS-TEAM)
Université Toulouse Capitole (UT Capitole)
Université de Toulouse (UT)-Université de Toulouse (UT)-Institut National des Sciences Appliquées - Toulouse (INSA Toulouse)
Institut National des Sciences Appliquées (INSA)-Université de Toulouse (UT)-Institut National des Sciences Appliquées (INSA)-Université Toulouse - Jean Jaurès (UT2J)
Université de Toulouse (UT)-Université Toulouse III - Paul Sabatier (UT3)
Université de Toulouse (UT)-Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique (Toulouse) (Toulouse INP)
Université de Toulouse (UT)-Université Toulouse Capitole (UT Capitole)
Université de Toulouse (UT)
Source :
Microelectronic Engineering, Microelectronic Engineering, Elsevier, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩, Microelectronic Engineering, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩
Publication Year :
2010
Publisher :
HAL CCSD, 2010.

Abstract

International audience; This paper deals with the study of spin coating processes for the deposition of polysiloxane-based thin films. Specific developments are proposed in order to adapt the hydrodynamic laws theory to the spin coating of Maxwellian liquids. Theoretical and experimental results are compared, evidencing a good fit and enabling to define the Maxwellian law for the studied polysiloxane polymer. Finally, the theoretical developments are successfully extended to the BCB 4026 and SU-8 3050 photosensitive resins.

Subjects

Subjects :
Materials science
02 engineering and technology
SU-8 resin 2
010402 general chemistry
01 natural sciences
spin coating
Deposition (phase transition)
[SPI.GPROC]Engineering Sciences [physics]/Chemical and Process Engineering
Electrical and Electronic Engineering
Thin film
Composite material
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
Maxwellian liquids
chemistry.chemical_classification
Spin coating
Condensed matter physics
Polymer
021001 nanoscience & nanotechnology
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
BCB resin
0104 chemical sciences
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
chemistry
polysiloxane
Scientific method
0210 nano-technology

Details

Language :
English
ISSN :
01679317 and 18735568
Database :
OpenAIRE
Journal :
Microelectronic Engineering, Microelectronic Engineering, Elsevier, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩, Microelectronic Engineering, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩
Accession number :
edsair.doi.dedup.....ba333a1de8bf5c6c4244d51a9d4c80c0

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