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Enhancement of nanovoid formation in annealed amorphous Al_2O_3 including W

Authors :
T. Shudo
Hideo Nakajima
Manabu Ishimaru
Akihiko Hirata
Masakazu Tane
Kazuhisa Sato
Hajime Kimizuka
Toyohiko J. Konno
Ryusuke Nakamura
Source :
Journal of Applied Physics. 110(64324)
Publication Year :
2011
Publisher :
AIP Publishing, 2011.

Abstract

application/pdf<br />Article<br />Journal of Applied Physics. 2011, 110 (64324)

Details

Language :
English
ISSN :
00218979
Volume :
110
Issue :
64324
Database :
OpenAIRE
Journal :
Journal of Applied Physics
Accession number :
edsair.doi.dedup.....c392f3124ab45899867729dc56341740