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Quantitative Imaging of InGaAs/GaAs Layers Using Transmission Electron Microscopy Methods: Characterization of Stresses and Chemical Composition

Authors :
Pierre Stadelmann
Eli Kapon
Philippe A. Buffat
Klaus Leifer
Alok Rudra
J. Cagnon

Abstract

Reference LPN-ARTICLE-2002-003doi:10.1016/S0022-0248(01)02297-7View record in Web of Science Record created on 2008-02-29, modified on 2017-05-12

Details

ISSN :
00220248
Database :
OpenAIRE
Accession number :
edsair.doi.dedup.....c69ec5e71c1a0434ce811239524a79c8